Publicación: In situ MEMS gradiometer with nanometer-resolution optical detection system
| dc.contributor.author | Campanella, H. | |
| dc.contributor.author | Del Real, R. P. | |
| dc.contributor.author | Duch, M. | |
| dc.contributor.author | Serre, C. | |
| dc.contributor.author | Lucas, I. | |
| dc.contributor.author | De Manuel, V. | |
| dc.contributor.author | Guerrero, H. | |
| dc.contributor.author | Esteve, J. | |
| dc.contributor.author | Díaz Michelena, M. | |
| dc.contributor.author | Plaza, J. A. | |
| dc.date.accessioned | 2022-02-16T12:41:57Z | |
| dc.date.available | 2022-02-16T12:41:57Z | |
| dc.date.issued | 2010-04-05 | |
| dc.description.abstract | Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers. | es |
| dc.description.peerreviewed | Peerreview | es |
| dc.identifier.citation | Sensors and Actuators A: Physical 159(1): 33-40(2010) | es |
| dc.identifier.doi | 10.1016/j.sna.2010.02.007 | |
| dc.identifier.issn | 9244247 | |
| dc.identifier.other | https://www.sciencedirect.com/science/article/abs/pii/S0924424710000701 | |
| dc.identifier.uri | http://hdl.handle.net/20.500.12666/638 | |
| dc.language.iso | eng | es |
| dc.publisher | Elsevier | es |
| dc.rights.accessRights | info:eu-repo/semantics/restrictedAccess | |
| dc.rights.license | Copyright © 2010 Elsevier B.V. All rights reserved. | |
| dc.subject | Magnetic transducers | es |
| dc.subject | Gradiometers | es |
| dc.subject | Magnetic devices | es |
| dc.subject | MEMS Sensors | es |
| dc.title | In situ MEMS gradiometer with nanometer-resolution optical detection system | es |
| dc.type | info:eu-repo/semantics/article | es |
| dc.type.coar | http://purl.org/coar/resource_type/c_6501 | |
| dc.type.hasVersion | info:eu-repo/semantics/publishedVersion | |
| dspace.entity.type | Publication |
