Focused-Ion-Beam-Assisted Magnet Fabrication and Manipulation for Magnetic Field Detection Applications

Campanella, H.; Del Real, R. P.; Díaz Michelena, M.; Duch, M.; Guerrero, H.; Esteve, J.; Plaza, J. A.

Publicación:
Focused-Ion-Beam-Assisted Magnet Fabrication and Manipulation for Magnetic Field Detection Applications

dc.contributor.author	Campanella, H.
dc.contributor.author	Del Real, R. P.
dc.contributor.author	Díaz Michelena, M.
dc.contributor.author	Duch, M.
dc.contributor.author	Guerrero, H.
dc.contributor.author	Esteve, J.
dc.contributor.author	Plaza, J. A.
dc.date.accessioned	2022-02-17T09:23:43Z
dc.date.available	2022-02-17T09:23:43Z
dc.date.issued	2009-02-16
dc.description.abstract	A focused-ion-beam-assisted technique intended for ultrasmall, hard-magnet fabrication has been developed. By means of ion-beam-induced milling and deposition, reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of a thin-film bulk acoustic resonator (FBAR). Electrical characterization of the FBAR before and after bonding of the magnet was carried out, thus observing both a downshifting of the resonance frequency and a reduction of the quality factor of the resonator. The magnetic behavior of the nanomagnet has been confirmed by means of magnetometry measurements based on atomic force microscopy.	es
dc.description.peerreviewed	Peerreview	es
dc.identifier.citation	ACS Applied Materials and Interfaces 1(3): 527-531(2009)	es
dc.identifier.doi	10.1021/am800205d
dc.identifier.doi	https://pubs.acs.org/doi/10.1021/am800205d
dc.identifier.e-issn	1944-8252
dc.identifier.issn	1944-8244
dc.identifier.uri	http://hdl.handle.net/20.500.12666/653
dc.language.iso	eng	es
dc.publisher	ACS Publications	es
dc.rights.accessRights	info:eu-repo/semantics/restrictedAccess
dc.rights.license	Copyright © 2009, American Chemical Society
dc.subject	Hard magnet nanofabrication	es
dc.subject	Focused ion beam	es
dc.subject	Thin-film bulk	es
dc.subject	Acoustic wave resonator	es
dc.title	Focused-Ion-Beam-Assisted Magnet Fabrication and Manipulation for Magnetic Field Detection Applications	es
dc.type	info:eu-repo/semantics/article	es
dc.type.coar	http://purl.org/coar/resource_type/c_6501
dc.type.hasVersion	info:eu-repo/semantics/publishedVersion
dspace.entity.type	Publication