Examinando por Autor "Serre, C."

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In situ MEMS gradiometer with nanometer-resolution optical detection system
(Elsevier, 2010-04-05) Campanella, H.; Del Real, R. P.; Duch, M.; Serre, C.; Lucas, I.; De Manuel, V.; Guerrero, H.; Esteve, J.; Díaz Michelena, M.; Plaza, J. A.
Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers.