Copyright © 2010 Elsevier B.V. All rights reserved.Campanella, H.Del Real, R. P.Duch, M.Serre, C.Lucas, I.De Manuel, V.Guerrero, H.Esteve, J.Díaz Michelena, M.Plaza, J. A.2022-02-162022-02-162010-04-05Sensors and Actuators A: Physical 159(1): 33-40(2010)9244247https://www.sciencedirect.com/science/article/abs/pii/S0924424710000701http://hdl.handle.net/20.500.12666/638Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers.engMagnetic transducersGradiometersMagnetic devicesMEMS Sensorsinfo:eu-repo/semantics/article10.1016/j.sna.2010.02.007info:eu-repo/semantics/restrictedAccess