Copyright © 2009, American Chemical SocietyCampanella, H.Del Real, R. P.Díaz Michelena, M.Duch, M.Guerrero, H.Esteve, J.Plaza, J. A.2022-02-172022-02-172009-02-16ACS Applied Materials and Interfaces 1(3): 527-531(2009)1944-8244http://hdl.handle.net/20.500.12666/653A focused-ion-beam-assisted technique intended for ultrasmall, hard-magnet fabrication has been developed. By means of ion-beam-induced milling and deposition, reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of a thin-film bulk acoustic resonator (FBAR). Electrical characterization of the FBAR before and after bonding of the magnet was carried out, thus observing both a downshifting of the resonance frequency and a reduction of the quality factor of the resonator. The magnetic behavior of the nanomagnet has been confirmed by means of magnetometry measurements based on atomic force microscopy.engHard magnet nanofabricationFocused ion beamThin-film bulkAcoustic wave resonatorinfo:eu-repo/semantics/article10.1021/am800205dhttps://pubs.acs.org/doi/10.1021/am800205d1944-8252info:eu-repo/semantics/restrictedAccess